OZONE GENERATING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an ozone generating apparatus which can efficiently generate high purity ozone in a large amount while suppressing byproduct of nitrogen oxide and generation of dust from an electrode forming substance.

SOLUTION: The ozone generating apparatus is equipped with: a photo-chemical reaction space 2 in a quartz tube 6 which is disposed inside a metal case subjected to the surface treatment of the inner surface so as to reflect UV rays; a gas inlet 1 to introduce the object gas to be ozonized into the photochemical reaction space 2; a gas outlet 3 to discharge the ozonized gas to the outside; and a UV light emitting element 4 which is disposed inside the case 5 to irradiate the photochemical reaction space 2 with UV rays to convert oxygen in the gas into ozone and which has a p-n junction comprising a nitride compound semiconductor crystal.

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