| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a piezoelectric film composed of a quartz glass film which contains tetravalent elements such as germanium capable of preventing the rapid disappearing of piezoelectricity, and to provide a piezoelectric element. <P>SOLUTION: The piezoelectric film 12 is a laminated quartz glass film comprises a first quartz glass film 12a which contains tetravalent elements such as germanium, titanium, tin or the like by a first composition, a second quartz glass film 12b which is laminated on the first quarts glass film and contains tetravalent elements by a second composition, and a third quarts glass film 12c which contains tetravalent elements by a third composition different from the first and the second compositions. The piezoelectric film 12 is obtained by carrying out piezoelectricity imparting processing such as polarization or heating. The piezoelectric element uses this. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
