| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo molecular pump having a pump unit and a drive control unit combined and not easily influenced by electromagnetic noise from an outside. SOLUTION: A drive control unit storage space 250 is formed at a lower side part of a base 25 and a drive control unit chassis 252 having a drive control unit circuit 251 stored in the drive control unit storage space 250 is provided. The drive control unit chassis 252 is a electromagnetic noise insulation case and is electrically insulated from a surrounding base 25. A noise filter 258 is provided in an electric power supply line and a signal line between a magnetic bearing system and the drive control unit circuit 251, and an electric power supply line and a signal line between a motor system and the drive control unit circuit 251 respectively. A line filter 256 is provided in an input line of the drive control unit circuit 251. COPYRIGHT: (C)2006,JPO&NCIPI
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