ЭУФ ИСТОЧНИК С ВРАЩАЮЩИМИСЯ ЭЛЕКТРОДАМИ И СПОСОБ ПОЛУЧЕНИЯ ЭУФ ИЗЛУЧЕНИЯ ИЗ ГАЗОРАЗРЯДНОЙ ПЛАЗМЫ

摘要

The invention relates to a method and device for obtaining EUV radiation from a gas-discharge plasma by means of rotating electrodes (2, 3) inducing a discharge between heteropolar electrodes, and igniting a pinch-type discharge with the shaft (1) rotating at defined speed. The object of the invention to find a novel possibility for obtaining EUV radiation from a gas-discharge plasma by the use of rotating electrodes (2, 3) without limited average power and pulse repetition rate of the EUV source, is met according to the invention by pulse-forming a channel of working substance vapors in a peripheral region of the inter-electrode gap (d) located a defined distance from the rotational axis (R), and then igniting the pinch-type discharge, wherein the consumption of working substance is compensated by continuously supplying low-melting metal to the surface of at least one of the electrodes. In a preferred embodiment the vapor channel is generated by a pulse laser or electron beam focused on the layer (4) of low-melting metal.