| 发明名称 |
DEVICE FOR COATING BOTH SIDES OF A SUBSTRATE WITH A HYDROPHOBIC LAYER |
| 摘要 |
Disclosed is a device for coating both sides of substrates (10) with a hydrophobic layer in a vacuum coating system (20). Said device comprises a substrate holder (26), on one side of which a first evaporator (48) is disposed for evaporating a substance that forms the hydrophobic layer. A second evaporator (50) is arranged on the side located opposite said one sid e.
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| 申请公布号 |
CA2561976(A1) |
申请公布日期 |
2005.10.20 |
| 申请号 |
CA20052561976 |
申请日期 |
2005.04.01 |
| 申请人 |
CARL ZEISS VISION GMBH;LEYBOLD OPTICS GMBH |
发明人 |
WICHT, MANFRED;FUHR, MARKUS;WINTER, KARL-HEINZ;ZUELTZKE, WALTER |
| 分类号 |
C23C14/50;B05C9/02;C23C14/24;C23C14/32 |
主分类号 |
C23C14/50 |
| 代理机构 |
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代理人 |
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| 主权项 |
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