| 摘要 |
PROBLEM TO BE SOLVED: To provide a photodetective element which simultaneously realizes all of the easiness of module making, acceleration of a responding speed, and improvement of photodetecting efficiency. SOLUTION: The surface-incident photodetective element having an optical absorption layer 15 formed on a substrate 11 is provided with a light reflection and refraction part 16 provided with a cavity to the optical absorption layer 15 from the surface of the photodetective element, and consisting of a plurality of regular mesa state slopes of the optical absorption layer 15 constituting a part of the cavity. When light incident from the surface passes through the light reflection and refraction part 16, the advancing direction of the light is changed by the reflection and refraction by the light reflection and refraction part 16 and incident on the optical absorption layer 15. COPYRIGHT: (C)2006,JPO&NCIPI
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