| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a ceramic heater, capable of keeping the electric resistance of a conductor pattern within a range of its design value. SOLUTION: In this manufacturing method of the ceramic heater, an unbaked substrate for a ceramic heater which is provided with an unbaked ceramic sheet (made of alumina or the like) and a plurality of unbaked conductor patterns (containing platinum powder or the like) is made, a plurality of unbaked ceramic heaters provided with unbaked ceramic layers and unbaked conductor patterns are cut off from this substrate, they are baked, electric resistance of each conductor pattern is measured after that, their average value is then calculated, after that, an unbaked substrate for a ceramic heater which is provided with a plurality of line width adjusted unbaked conductor patterns the line width of which is adjusted so as to make the difference between the average value and the design value of the electric resistance small is made, a plurality of the unbaked ceramic heaters obtained after the line width has been adjusted is then cut off, and it is baked after that. COPYRIGHT: (C)2006,JPO&NCIPI
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