发明名称 METHOD OF FORMING METAL THIN-FILM LAYER ON CONDUCTIVE ITO FILM OR ON GLASS SUBSTRATE SURFACE AS BASE SUBSTRATE OF ITO FILM, AND METAL THIN-FILM LAYER ON CONDUCTIVE ITO FILM OR ON GLASS SUBSTRATE SURFACE AS BASE SUBSTRATE OF THE ITO FILM
摘要 PROBLEM TO BE SOLVED: To provide a method, capable of forming a fine metal thin film pattern excellent in adherence properties on the surface of a conductive ITO film and a glass substrate of a base substrate, with high drawing precision, high workability, and high reproducibility. SOLUTION: The thin film layer of transition metal is formed by applying a solvent formed by dissolving transition metal compound, containing organic anion and cation of transition metal in organic solvent on the ITO film and on the surface of the glass substrate of a base substrate, and applying heat treatment thereto. The fine metal thin-film pattern with superior adherence properties is formed on the surface of the transition metal thin film layer, by applying a liquid, in which metal fine particles with average size of 1 to 100 nm are dispersed at a prescribed thickness, and by forming a layer in which fine metal particles are sintered mutually, by heating and sintering the above. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005293937(A) 申请公布日期 2005.10.20
申请号 JP20040104791 申请日期 2004.03.31
申请人 HARIMA CHEM INC;ULVAC JAPAN LTD 发明人 UEDA MASAYUKI;KOYAMA MASAHIDE;HATA NORIAKI;MATSUBA YORISHIGE;IWASHIGE HIROSHI;ODA MASAAKI
分类号 G02F1/1343;C03C17/34;H01B5/14;H01B13/00;(IPC1-7):H01B13/00;G02F1/134 主分类号 G02F1/1343
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