METHOD OF MEASURING DOUBLE REFRACTION PLATE BY ELLIPTICALLY POLARIZED LIGHT INCIDENCE

摘要

PROBLEM TO BE SOLVED: To provide a method of measuring a directional angleψand an absolute relative phase differenceρtolin a double refraction plate due to elliptically polarized light incidence. SOLUTION: The absolute relative phase differenceρtolis measured by comparing a measured intensity with that in a calibration table measured preliminarily, in a conventional measuring method using the elliptically polarized light incidence. The present invention measures emission light from the double refraction plate due to the elliptically polarized light incidence by a method according to the mathematical expression 2, using an analyzer system constituted of a 1/4 wavelength plate Q2and a polarizer P2. A phase error in the 1/4 wavelength plate Q2due to an optional wavelength of incident light is subjugated thereby. The directional angleψand the relative phase differenceρare obtained thereby respectively according to the mathematical expression 3 and the mathematical expression 4, when an ellipticity angleεand a directional angleθof the elliptically polarized light is known, and the optional directional angleψand the absolute relative phaseρtoltherein are obtained by phase-coupling those. COPYRIGHT: (C)2006,JPO&NCIPI