发明名称 NONVOLATILE SEMICONDUCTOR STORAGE DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a nonvolatile semiconductor storage device which can improve the writing speed of data. <P>SOLUTION: The nonvolatile semiconductor storage device is provided with a memory array where a plurality of memory cells each enabling electrical update of information are arranged. This memory cell comprises a semiconductor substrate, an element isolating region formed on the semiconductor substrate, an element region divided with the element isolating region, a first insulating film formed on the element region, a floating gate formed on the first insulating film, a second insulating film formed on the floating gate and has the dielectric constant which is higher than that of a silicon nitride film, and a control gate formed on the second insulating film. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p>
申请公布号 JP2005294392(A) 申请公布日期 2005.10.20
申请号 JP20040104767 申请日期 2004.03.31
申请人 TOSHIBA CORP 发明人 NAKAMURA TAKUYA;WATABE HIROSHI
分类号 G11C16/02;G11C16/04;H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/824 主分类号 G11C16/02
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