发明名称 |
Small lot size substrate carriers |
摘要 |
In a first aspect, an apparatus is provided for opening a substrate carrier door of a substrate carrier. The apparatus includes a supporting member adapted to (1) support the substrate carrier door at a load port; (2) allow removal of the door from the substrate carrier; and (3) pivot the removed door below a bottom surface of the substrate carrier. Numerous other aspects are provided.
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申请公布号 |
US2005232734(A1) |
申请公布日期 |
2005.10.20 |
申请号 |
US20050051504 |
申请日期 |
2005.02.04 |
申请人 |
ELLIOTT MARTIN R;RICE MICHAEL R;HUDGENS JEFFREY C;ENGLHARDT ERIC A;BELITSKY VICTOR |
发明人 |
ELLIOTT MARTIN R.;RICE MICHAEL R.;HUDGENS JEFFREY C.;ENGLHARDT ERIC A.;BELITSKY VICTOR |
分类号 |
B65G65/04;H01L21/00;H01L21/673;H01L21/677;(IPC1-7):B65G65/04 |
主分类号 |
B65G65/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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