| 摘要 |
PROBLEM TO BE SOLVED: To provide an improved spin stand comprising a platen which can operate freely in the Z-axis direction though it is suppressed about each movement of the X-axis and Y-axis. SOLUTION: Through at least one bent bodies 36 and 38 which consist of flexible material, the first end of which is rigidly fitted to an XY stage 32 and the second end of which is rigidly fitted to the platen 12, the platen 12 is fitted flexibly to the XY stage 32. The flexture bodies 36 and 38 essentially allows moving of the platen 12 in the Z-axis direction, and suppresses its moving in the X-axis direction and Y-axis direction. COPYRIGHT: (C)2006,JPO&NCIPI |
