ELECTRON BEAM LITHOGRAPHY SYSTEM

摘要

PROBLEM TO BE SOLVED: To strengthen a rigidity of a jointing part between an electron optical tube and a sample chamber. SOLUTION: A flange face of the electron optical tube is widened and jointed by two row bolts to apply a high contact surface pressure. Further, a thin soft-metal material is inserted between the flange face of the electron optical tube and a mounting surface in the sample chamber to strengthen the rigidity of the jointing part. This improves a fixing rigidity of the electron optical tube to the sample chamber to improve a shake-proof, which lowers a shift in position at the time of lithography. COPYRIGHT: (C)2006,JPO&NCIPI