| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum system where the adverse influence of dust generated at a planetary in a chamber can be evaded. SOLUTION: The vacuum system 1 comprises a vacuum exhausting means and a vacuum chamber 2, and the vicinity of a dust generation part by friction driving in the vacuum chamber 2 is provided with a dust suction means 10. COPYRIGHT: (C)2006,JPO&NCIPI
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