发明名称 |
Job flow Petri Net and controlling mechanism for parallel processing |
摘要 |
The present disclosure provides a job flow system for use in a manufacturing environment, such as a semiconductor fab. The job flow system includes a plurality of sequence-related jobs associated with the manufacturing and a computer-controlled Petri Net structure. The Petri Net structure includes a plurality of agents associated with each of the sequence-related jobs. The Petri Net structure also includes a plurality of application processes to be performed by the agents, one or more description files, and a PN Center for loading the one or more description files and activating a first agent to perform one or more of the application processes in response to the one or more description files and in response to process status information from application processes.
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申请公布号 |
US2005234575(A1) |
申请公布日期 |
2005.10.20 |
申请号 |
US20040823867 |
申请日期 |
2004.04.14 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
WU CHUAN-JEN;DAI CHYUARN-YUH;SUN TIEN-HSIANG |
分类号 |
G05B19/418;G06F19/00;(IPC1-7):G06F19/00 |
主分类号 |
G05B19/418 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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