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发明名称
DEVICE FOR MONITORING MISS CLAMP OF WAFER IN SEMICONDUCTOR MANUFACTURE DEVICE
摘要
申请公布号
KR20050100868(A)
申请公布日期
2005.10.20
申请号
KR20040026067
申请日期
2004.04.16
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, HYUN OH;SEO, KWANG HA;JUNG, SUK YONG
分类号
H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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