| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a coating device and a coating method capable of easily realizing the maximization of an effective product area on one sheet of a coating target at a low cost by minimizing a defective film thickness zone that does not reach a targeted film thickness scope generated in a section where a coating is first started while indicating a means capable of finely adjusting the film thickness profile of the coating film in the section where the coating is started, thereby to maximize an even film thickness zone. <P>SOLUTION: The coating method is such one that a coater having an outlet extending in one direction nearly approaches the coating target, a coating liquid is supplied to the coater from a fixed delivery pump to deliver the coating liquid to the coating target from the coater, and the coating target is moved relatively to the coater to form the coating film on the coating target, wherein a pressure at the time of the coating is sensed halfway in the path running from the fixed delivery pump to the coater, and coating is performed by controlling the pressure so as to allow a pressure waveform shape at the time of the coating detected to be a desired shape. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
