| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a stamper for obtaining a high-density large recording capacity optical disk, and also to provide a manufacturing method of an optical disk. SOLUTION: After a photoresist 2 is applied to a substrate 1, the photoresist 2 is exposed to light by using a far ultraviolet laser beam having a wavelength of 180-300 nm, and then a pit or a grouve-like pattern is formed by developing. Then, a metallic thin layer 7 is formed on the pit or the grouve-like pattern, and electrolytic metal plating is made on the metallic thin layer 7 to obtain a stamper 8. In such a manufacturing method, the photoresist 2 contains a copolymer of vinylphenol and methyl methacrylate whose weight-average molecular weight is 2,000-10,000, wherein the ratio of former to the latter is 3/7-7/3, and a naphthoquinonazide-substituted compound having A parameter of 0.6-1.5μm<SP>-1</SP>. COPYRIGHT: (C)2006,JPO&NCIPI
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