| 摘要 |
PROBLEM TO BE SOLVED: To provide a fan filter unit enabling the attachment/detachment of a chemical filter in a clean space in a short time, having an attachment/detachment structure enabling the easy space-saving and maintenance, and the easy installation of the fan filter unit. SOLUTION: This fan filter unit comprises a chamber 6 incorporating a fan 1, a motor 2, a fan unit top board part 4 formed integral with a top board 3, and the chemical filter 5 and a fan filter air cleaning unit 8 having a dust removal filter 7 disposed on the downstream side of the chamber 6. The fan unit top board part 4 is fixed to the chamber 6 by a means releasable from the chamber 6 incorporating the chemical filter 5. Thus, the fan filter unit incorporating the chemical filter enabling the chemical filter 5 to be removed from the upper surface of the chamber 6 by removing the fan unit top board part 4 from the upper surface of the chamber 6 can be provided. COPYRIGHT: (C)2006,JPO&NCIPI
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