| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic compound vibrator for an ultrasonic processing machine which is rich in rigidity of a vibrator, has high positioning accuracy of a top end and has low loss. SOLUTION: The ultrasonic compound vibrator in which phase difference between a longitudinal wave and a twisting wave at a driving frequency of a vibrator in close proximity of a longitudinal wave resonance frequency is not zero but is nearπ/2 and further which is formed so that one end face is a node face of vibration and another end face is an antinode face of vibration, is designed and its optimal structure is determined by simulation. COPYRIGHT: (C)2006,JPO&NCIPI
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