发明名称 |
MEM structure having reduced spring stiction |
摘要 |
A micro-electromechanical (MEM) device has a folded tether spring in which each fold of the spring is surrounded by a rigidly fixed inner structure and outer structure. The fixed inner structure increases restoring force of the spring. The rigidly fixed inner and outer structures each have a major surface that include a plurality of notches of fixed width relative to a distance between the major surface and the spring. Additionally in one form extensions from the major surface of the rigidly fixed inner and outer structures are provided at distal ends thereof to make initial contact with the spring. The notches of the MEM device both reduce surface area contact with the spring and wick moisture away from the spring to minimize stiction.
|
申请公布号 |
US2005229706(A1) |
申请公布日期 |
2005.10.20 |
申请号 |
US20040828042 |
申请日期 |
2004.04.20 |
申请人 |
VANDEMEER JAN E;GOGOI BISHNU P;HAMMOND JONATHAN H |
发明人 |
VANDEMEER JAN E.;GOGOI BISHNU P.;HAMMOND JONATHAN H. |
分类号 |
B81B3/00;G01P15/08;G01P15/125;(IPC1-7):G01P15/125 |
主分类号 |
B81B3/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|