DEVICE FOR PRODUCING EXCITED AND/OR IONISED PARTICLES IN A PLASMA AND METHOD FOR PRODUCING IONISED PARTICLES

摘要

The invention relates to a device for producing excited and/ or ionised particles in a plasma, comprising a generator (11) which is used to produce an electromagnetic wave and an excitation chamber (20) comprising a plasma area wherein the excited and/or ionised particles are formed. At least one stimulation chamber is arranged in an insulating material (18) in an off-centre position in relation to an annular-cylindrical outer conductor (17).