| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent or reduce face sagging of an object to be processed in a method for surface polishing the object. <P>SOLUTION: In this method for surface polishing the object 1 to be processed, a step for providing a face sagging protective member 2 having thickness ≥0.8 times as much as target thickness of the object 1, and a step for surface polishing the object 1 in a state in which the face sagging protective member 2 is arranged adjacent or close to an edge part of the object 1 are included. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
