| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a discharge type gas purification apparatus and a purification method for removing fine solid or liquid particles contained in gas as impurities from gas for purifying. <P>SOLUTION: This discharge type gas purification apparatus comprises in a facing state arranged electrodes 2a, 2b with different effective areas, a high frequency power source 1 generating high frequency discharge between the electrodes by applying voltage to the electrodes, and a gas circulating means for circulating gas containing fine particles between the electrodes. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
