| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate carrying device capable of simplifying structure and reducing device cost while reducing the number of parts, and size and weight of the device. <P>SOLUTION: The substrate carrying device 1 is provided with a pair of side plates 3, 4 arranged outside a pair of conveyors 5, 6 so as to be separated from each other, a screw shaft 10 with both ends rotatably supported by the pair of side plate 3, 4 to be rotated and driven, passing through through parts 18 respectively formed on the pair of conveyors 5, 6, a connecting member 19 screwed to the screw shaft 10, formed so as to pass through the through parts 18, and fixed selectively to one 5(6) of the pair of conveyors 5, 6, and a fixing member 28 for selectively fixing the other 6(5) of the pair of conveyors 5, 6 to the side plate 4(3) placed outside the other conveyor 6(5). <P>COPYRIGHT: (C)2006,JPO&NCIPI |
