ELECTRONIC CIRCUIT DEVICE WITH SILICON SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide an electronic circuit having a silicon substrate wherein a compact, high-performance passive element or sensor is incorporated. SOLUTION: The electronic circuit device is comprised of a silicon substrate that includes a semiconductor device and wherein a recessed part is formed and at least one passive element that is formed by another process different from a silicon planer process for forming the semiconductor device. It is provided with a silicon substrate that electrically connects the semiconductor device, wherein the passive element is embedded in the recessed part of the silicon substrate and that is formed in the silicon substrate with the passive element. COPYRIGHT: (C)2006,JPO&NCIPI