发明名称 NON-SINGLE CRYSTAL TRANSISTOR INTEGRATED CIRCUIT AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a non-single crystal transistor integrated circuit with much more features, and also to provide its manufacturing method. SOLUTION: First, a through-hole is formed in a high polymer film 1. An electric conductivity path is established between electrodes 2 and 3 on the front and rear faces via the through-hole. Next, a gate insulation film 5 is applied and then is hardened in an oven. Then, part of polyimide is peeled off to be ready for the formation of a via. Thereafter, an organic semiconductor layer 6 is formed by the evaporation method, etc. By using a metal mask during the evaporation, the organic semiconductor layer 6 is formed only in necessary parts to perform element isolation. Finally, a source electrode 7 and a drain electrode 8 are formed to complete an organic transistor 9. After forming the integrated circuit of the organic transistor 9 as described so far, N sheets 10 (N is a natural number of 2 or larger. In Figure, N is 3), each containing the integrated circuit of the organic transistor 9, are laid on top each other and pasted together. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005294300(A) 申请公布日期 2005.10.20
申请号 JP20040102748 申请日期 2004.03.31
申请人 UNIV OF TOKYO 发明人 SOMEYA TAKAO;SAKURAI TAKAYASU;KAWAGUCHI HIROSHI;SEKIYA TAKESHI
分类号 G01L1/14;G01B7/16;G01L5/00;H01L21/336;H01L27/146;H01L29/786;H01L29/84;(IPC1-7):H01L21/336 主分类号 G01L1/14
代理机构 代理人
主权项
地址