| 摘要 |
PROBLEM TO BE SOLVED: To provide a chip inspection device and a chip inspection method for a disk-shaped component capable of inspecting a chip in a disk-shaped inspected object quickly and stably, and comprising relatively simple configuration. SOLUTION: A side face of the inspected object 1 is illuminated from a vertical direction of the side face by a disk side face lighting means 2, the inspected object 1 is imaged from a center axis direction of the inspected object 1 by a disk-shaped component imaging means 3, a disk side face concentration image data input from the disk-shaped component imaging means 3 is stored in an image data storage means 5, position coordinates of an outer circumferential position (edge) on an inspected object 1 surface are found at a prescribed circumferential-directional angle pitch by a side face position detecting means 6, a reference circle is calculated by a side face reference circle calculating means 7, based on all the position coordinates of the edge, and then the presence of the chip is determined by a chip defect determining means 8, based on a difference between a radius in each of the coordinates and a radius of the reference circle. COPYRIGHT: (C)2006,JPO&NCIPI
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