| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized semiconductor pressure sensor, semiconductor acceleration sensor, and semiconductor stress sensor respectively having output signals of high noise resistances, operated at low voltages. SOLUTION: Ring oscillators are formed on a semiconductor surface serving as detecting parts for a stress, pressure and acceleration. Frequencies of digital pulse signals oscillated from the ring oscillators are varied according to changes of the stress, pressure and acceleration. The stress, pressure, and acceleration are calculated based on the digital pulses. COPYRIGHT: (C)2006,JPO&NCIPI
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