| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and method for discharging droplets capable of realizing a precise discharge action for droplets and obtaining a sufficient discharge precision even if applying a size of substrate such as a large-sized substrate and a tiling substrate, suppressing the drying irregularity of a functional layer drawn on the substrate, and forming a uniform film quality of the functional layer. SOLUTION: An apparatus for discharging droplets is provided with a drawing means 14, 16 forming patterns on a substrate P while a discharge head 20 and the substrate P are relatively moved, an imaging means 24 obtaining alignment information on the substrate P, a positioning means 14, 16 deciding a relative position of the discharge head 20 and the substrate P and a control means CONT. The imaging means 24 is characterized in forming patterns in each drawing region while the control means CONT operates the positioning means 14, 16 and the drawing means 14, 16 from the alignment information which is acquired in a batch by the alignment information. COPYRIGHT: (C)2006,JPO&NCIPI
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