发明名称 Testing MEM device array
摘要 A system of an embodiment of the invention includes an array of micro-electromechanical (MEM) device assemblies and a testing mechanism situated outside of the array of the MEM device assemblies. Each MEM device assembly includes a MEM device capable of being individually written to, but incapable of being electrically read. The testing mechanism tests each MEM device assembly for proper operation without directly reading the MEM device of the MEM device assembly.
申请公布号 US2005231204(A1) 申请公布日期 2005.10.20
申请号 US20040825882 申请日期 2004.04.17
申请人 MARTIN ERIC T;GHOZEIL ADAM 发明人 MARTIN ERIC T.;GHOZEIL ADAM
分类号 B81C99/00;G01R31/327;G11C29/54;G11C29/56;(IPC1-7):G01R31/327 主分类号 B81C99/00
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