LUMINOUS BODY, ELECTRON BEAM DETECTOR USING THE SAME, SCANNING ELECTRON MICROSCOPE, AND MASS ANALYSIS DEVICE

摘要

There are provided a luminous body having a rapid response speed and a high luminiferous level, and an electron beam detector, a scanning electron microscope, and a mass analysis device using the luminous body. In the luminous body (10), when a nitride semiconductor layer (14) formed on one surface (12a) of the substrate (12) emits fluorescence by receiving electrons, at least a part of the fluorescence transmits the substrate (12) and emits fluorescence from the other surface (12b) of the substrate. The response speed of the fluorescence is in the order of musec or below. Moreover, the luminiferous level of the fluorescence obtained is similar to the conventional P47 fluorescent material. That is, the luminous body (10) has a sufficiently high response speed and luminiferous level. Furthermore, since a cap layer (16) contributes to increase of the remaining ratio of the light emission in the nitride semiconductor layer (14), in this luminous body (10), it is possible to realize not only a high response speed and luminiferous level but also an excellent remaining ratio.