发明名称 Electrochemical methods for the formation of protective features on metallized features
摘要 Electrochemical processes and apparatus are described for forming a protective feature on the exposed surface of a metallized feature. The protective feature provides a diffusion barrier and protects the metallized feature from corrosion and contamination. Protective features formed from nickel, cobalt, and alloys of these metals are described.
申请公布号 US2005230262(A1) 申请公布日期 2005.10.20
申请号 US20040828011 申请日期 2004.04.20
申请人 SEMITOOL, INC. 发明人 CHEN LINLIN
分类号 C23C18/16;C25D5/02;C25D5/10;C25D7/12;C25D17/00;H01L21/288;H01L21/768;(IPC1-7):C25D5/02 主分类号 C23C18/16
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