发明名称 Improvements in and relating to a method for bonding of semiconductor devices to substrates
摘要 <p>1,079,323. Silicon - ceramic seals; soldering. UNITED AIRCRAFT CORPORATION. Dec. 14, 1965 [Dec. 30, 1964], No. 53119/65. Headings B3R and B3V. A silicon semi-conductor is bonded to a ceramic substrate by depositing a gold film on the substrate, positioning the semi-conductor on the film, and heating the assembly to form a gold-silicon eutectic. The assembly can be subjected to pressure and agitation while heated to a temperature of 425‹ C. Alternatively, a jet of hydrogen at 450‹ C. can be impinged on the assembly after heating the assembly to 300‹ C. Both the substrate and silicon can be cleaned prior to bonding by agitating them ultrasonically in an alcohol solution, the semi-conductor then being placed in a hydrofluoric acid bath.</p>
申请公布号 GB1079323(A) 申请公布日期 1967.08.16
申请号 GB19650053119 申请日期 1965.12.14
申请人 UNITED AIRCRAFT CORPORATION 发明人
分类号 H01L21/58 主分类号 H01L21/58
代理机构 代理人
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