| 摘要 |
PURPOSE:To satisfactorily match the emittance of an incident ion optical system with an acceptance of a quadupole mass filter (QMF) in all the time. CONSTITUTION:Application voltage of an incident ion optical system 12 is made to change according to drive voltage of QMF 13 so as to provide convergence according to mass of an object ion. The second incident ion optical system 24 which provides different convergence performance or divergence performance in the X axis and Y axis direction is added to the conventional axisymmetric incident ion optical system 12. |
