发明名称 Charge-trapping memory arrays
摘要 <p>The present invention relates to a memory array comprising a substrate and a plurality of bitlines having contacts and a plurality of wordlines intersecting the bitlines. A protective spacer is used to separate the bitline contacts from the wordlines adjacent to the bitline contacts to prevent damage caused during the formation of the bitline contacts. The present invention also relates to a method of forming the memory array.</p>
申请公布号 GB0518740(D0) 申请公布日期 2005.10.19
申请号 GB20050018740 申请日期 2004.01.08
申请人 SPANSION LLC 发明人
分类号 H01L21/8246;H01L27/115 主分类号 H01L21/8246
代理机构 代理人
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