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发明名称
Loading/unloading apparatus for handler
摘要
申请公布号
KR100522084(B1)
申请公布日期
2005.10.18
申请号
KR20000061944
申请日期
2000.10.20
申请人
发明人
分类号
G01R31/26;H01L21/66;(IPC1-7):G01R31/26
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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