| 发明名称 |
Method to control the relative position between a body and a surface |
| 摘要 |
A method to control a relative position between a surface and a body to form a pattern in the surface that features moving a body to obtain a desired relationship between the surface and the body. To that end, the method includes sensing the surface and the body and moving that body to obtain a desired spatial relationship with the surface.
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| 申请公布号 |
US6955868(B2) |
申请公布日期 |
2005.10.18 |
| 申请号 |
US20040785248 |
申请日期 |
2004.02.24 |
| 申请人 |
BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM |
发明人 |
CHOI BYUNG JIN;SREENIVASAN SIDLGATA V.;JOHNSON STEPHEN C. |
| 分类号 |
G03F7/20;G03F7/00;G03F9/00;H01L21/027;H02N2/00;(IPC1-7):G03F9/00 |
主分类号 |
G03F7/20 |
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