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发明名称
SiGe/SOI CMOS AND METHOD OF MAKING THE SAME
摘要
申请公布号
KR100522275(B1)
申请公布日期
2005.10.18
申请号
KR20020066211
申请日期
2002.10.29
申请人
发明人
分类号
H01L27/08;H01L27/092;H01L21/20;H01L21/324;H01L21/336;H01L21/8238;H01L21/84;H01L27/12;H01L29/786;(IPC1-7):H01L27/092
主分类号
H01L27/08
代理机构
代理人
主权项
地址
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