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发明名称
Fabrication Method of Metal Interconnection by Electroless Plating
摘要
申请公布号
KR100522824(B1)
申请公布日期
2005.10.18
申请号
KR20030070288
申请日期
2003.10.09
申请人
发明人
分类号
H01L21/288;(IPC1-7):H01L21/288
主分类号
H01L21/288
代理机构
代理人
主权项
地址
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