发明名称 Thin film transistor array substrate and method for manufacturing the same
摘要 A thin film transistor array substrate and a method for manufacturing the same is disclosed, in which it is possible to prevent mobile ions contained in a substrate from penetrating into a semiconductor layer by the gettering effect or neutralization in case soda lime glass is used for the substrate. The method includes forming a buffer layer on a substrate; doping impurity ions in the buffer layer; and forming a pixel electrode and a thin film transistor including a semiconductor layer on the buffer layer.
申请公布号 US6956237(B2) 申请公布日期 2005.10.18
申请号 US20030462692 申请日期 2003.06.17
申请人 LG.PHILIPS LCD CO., LTD. 发明人 OH JAE YOUNG;NAM SEUNG HEE
分类号 G02F1/1333;G02F1/136;G02F1/1368;H01L21/00;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/04;H01L29/15;H01L29/786;H01L31/062;(IPC1-7):H01L29/04 主分类号 G02F1/1333
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