发明名称 Cam driven paddle assembly for a plating cell
摘要 The present invention overcomes the drawbacks and limitations described above by providing a paddle assembly having a paddle that moves in a bidirectional fashion for agitating solution in a container of a plating cell. A follower is coupled to the paddle. The follower engages a rotatable cam and is propelled along the cam as the cam rotates. A drive mechanism rotates the cam.
申请公布号 US6955747(B2) 申请公布日期 2005.10.18
申请号 US20020253249 申请日期 2002.09.23
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BROWNE ROBERT M.;ALLEN DONALD G.;REINSTEIN HANK;THOMAS TODD
分类号 C25D7/12;C25D21/10;H01L21/288;(IPC1-7):C25D7/12;C25D17/02 主分类号 C25D7/12
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