发明名称 |
Cam driven paddle assembly for a plating cell |
摘要 |
The present invention overcomes the drawbacks and limitations described above by providing a paddle assembly having a paddle that moves in a bidirectional fashion for agitating solution in a container of a plating cell. A follower is coupled to the paddle. The follower engages a rotatable cam and is propelled along the cam as the cam rotates. A drive mechanism rotates the cam.
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申请公布号 |
US6955747(B2) |
申请公布日期 |
2005.10.18 |
申请号 |
US20020253249 |
申请日期 |
2002.09.23 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BROWNE ROBERT M.;ALLEN DONALD G.;REINSTEIN HANK;THOMAS TODD |
分类号 |
C25D7/12;C25D21/10;H01L21/288;(IPC1-7):C25D7/12;C25D17/02 |
主分类号 |
C25D7/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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