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发明名称
VERFAHREN ZUM BETRIEB VON VAKUUMANLAGEN MIT DRÜCKÄNDERUNGEN
摘要
申请公布号
AT306023(T)
申请公布日期
2005.10.15
申请号
AT20040007325T
申请日期
2004.03.26
申请人
APPLIED FILMS GMBH & CO. KG
发明人
HEIN, STEFAN;KLEMM, GUENTER
分类号
B65H5/02;B08B5/02;B08B5/04;B65H23/025;B65H27/00;C23C14/56;D06C3/06;D21G1/02;F16C13/00;H01L21/02;(IPC1-7):F16C13/00
主分类号
B65H5/02
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代理人
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地址
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