MICROSTRUCTURE A SURFACE FONCTIONNALISEE PAR DEPOT LOCALISE D'UNE COUCHE MINCE ET PROCEDE DE FABRICATION ASSOCIE

摘要

An electromechanical structure (1) incorporating a first mechanical part (102) made of a first conductive material and which includes an elastically deformable area (104) having a given thickness with an exposed surface (2) and a first organic film (4) with a given thickness, which is deposited over the entire exposed surface of the deformable area. The thickness of this first film is such that the elastic response of the deformable area including the first film does not change by more than 5% in relation to the response of the bare deformable area or the first film is ten times smaller than the thickness of the deformable area. Independent claims are also included for: (a) a pressure sensor incorporating an electromechanical microstructure; (b) a platelet incorporating an assembly of microstructures; (c) a microsystem incorporating an electromechanical microstructure.