| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample base for mounting samples to be evaluated by TEM and capable of reducing effects to sample evaluation when the samples are analyzed by EDS. SOLUTION: The sample base 10 of mounting an evaluation sample 20 to be evaluated through the use of a transmission electron microscope 30 includes both a substrate 11 and a mounting part 13 provided on the substrate for mounting the evaluation sample. The mounting part includes an organic material or an inorganic material. The inorganic material is boron, beryllium, or boron nitride. Since the mounting part 13 made of the material is provided on the substrate 11, X rays hardly occur from the sample base due to scattering electrons and X rays from the evaluation sample at the evaluation of the evaluation sample. The effects of the sample base to sample evaluation are therefore reduced. COPYRIGHT: (C)2006,JPO&NCIPI
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