| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement sensor suitable for measuring the displacement of an object using light such as infrared rays and laser light allowing high precision with a simple structure. SOLUTION: The displacement sensor comprises: a light emitting section which irradiates the object with light; a pair of light receiving elements of which light receiving surfaces, which receive reflected light reflected from the object, are arranged at a predetermined site, which is correlated with the distance from a predetermined reference point to the object, in the same direction and with being laterally juxtaposed to each other to output a level of the reflected light as a detection signal; an integrator which integrates for predetermined time and outputs levels of the detection signal selected by a switch which selects and outputs either one of the detection signal outputted by the pair of light receiving elements; a comparator which outputs a switching signal, which switches the selected one detection signal to the other detection signal, to the switch; and a calculation section which determines the displacement of the object from a ratio of the sum to the difference between time for selecting one detection signal of the switching signal which is inputted to the switch by the comparator and time for selecting the other detection signal. COPYRIGHT: (C)2006,JPO&NCIPI
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