| 摘要 |
PROBLEM TO BE SOLVED: To improve the resolution of reflectometry and OCT measurement, by reducing the influence of dispersion. SOLUTION: A dispersion correcting apparatus comprises a data storage section 34 for storing the difference between a sample optical path of the wavelength dependency of the refractive index of optical components and a sample to be used as the wavelength dependency data of the optical optical path length of the optical system and sample, when wave-demultiplexing light in which the wavelength of high interference light is changed continuously or discretely into a reference optical path and a sample optical path, wave-multiplexing light through the reference optical path and light through the sample optical path, detecting the intensity of wave-multiplexed light, obtaining the relationship between the position in the direction of the optical axis of the sample and backscattering intensity by analyzing light intensity signal data for each wavelength, and calculating the intensity of the backscattering light for each minute region discriminated by approximately 1 to 100 microns in the direction of the optical axis of the sample; and a conversion processing section 36 for correcting the wavelength dependency of the refractive index, based on the wavelength dependency data of the optical optical path length of the optical system and the sample, when performing the signal conversion of light intensity signal data for each detected wavelength from a function with a position as a variable to a function with a position as a variable. COPYRIGHT: (C)2006,JPO&NCIPI
|
