| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a ring end face defect inspection apparatus for improving efficiency and obtaining improved precision and reproducibility, by automating the inspection of the end face defects of a metal ring 2. <P>SOLUTION: When the end face defects of the metal ring 2 are inspected by a defect inspection section 15, an angle to the surface to be inspected at least in first and second waveguides included in the defect inspection section 15 is continuously changed in a prescribed range (θ1 toθ5) by an angle changing means. The change operation is equivalent to an operation (an operation for diversely changing the visual recognition direction to an end face 2a of the metal ring 2) in visual inspection, so that an empirical rule of visual inspection is applied (luster marks on the end face 2a can be found easily by visual inspection while changing the angle of the metal ring 2). <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
