| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm flow meter in which measuring performance is not lowered by an impact even in the cast that the diaphragm flow meter is accidentally dropped to add an accidental impact (an impact mainly in vertical directions) to the flow meter. SOLUTION: The diaphragm flow meter is provided with a diaphragm part provided in a state in which its circumferential edge part is fixed to a casing, which forms a measuring chamber, and reciprocated by the supply and discharge of gas for and from the measuring chamber and a wing shaft inserted in the casing in such a way as to freely relatively oscillate on its axis. A part of the wind shaft on the side of one end is connected to the diaphragm part via a wing, and the wing shaft is oscillated on the axis according to the reciprocating movements of the diaphragm part to constitute the diaphragm flow meter. For constituting the diaphragm meter, movement suppressing parts 16a and 160a are provided between the wind shaft and the casing for allowing relative oscillations and suppressing the axial movements of the wing shaft. COPYRIGHT: (C)2006,JPO&NCIPI
|
