IMPRINTING STAMPER, MANUFACTURING METHOD OF THE IMPRINTING STAMPER, IMPRINT METHOD, AND DISASSEMBLING METHOD OF THE IMPRINTING STAMPER

摘要

PROBLEM TO BE SOLVED: To provide an imprinting stamper that performs accurate imprint on the entire surface of a resist substrate and is inexpensive, and to provide a manufacturing method of the imprinting stamper, an imprint method, and a decomposition method of the imprinting stamper. SOLUTION: The imprinting stamper has a support substrate 10; a separation film 20 exhibiting release property by radiation energy onto the support substrate 10; and transfer section 30 on the separation film 20, which has a scale of Rockwell hardness of M80 or higher and a surface having an irregular pattern. COPYRIGHT: (C)2006,JPO&NCIPI